Siavash Pourkamali Anaraki

Associate Professor

  • 1372 Citations
  • 21 h-Index
20032017

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Resonators Engineering & Materials Science
Silicon Engineering & Materials Science
MEMS Engineering & Materials Science
resonators Physics & Astronomy
Temperature Engineering & Materials Science
Fabrication Engineering & Materials Science
Sensors Engineering & Materials Science
Accelerometers Engineering & Materials Science

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Research Output 2003 2017

  • 1372 Citations
  • 21 h-Index
  • 82 Conference contribution
  • 33 Article

A 3-bit digitally operated MEMS rotational accelerometer

Kumar, V., Ramezany, A., Mazrouei, S., Jafari, R. & Pourkamali, S. Feb 23 2017 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., p. 1087-1090 4 p. 7863602

Research output: Chapter in Book/Report/Conference proceedingConference contribution

MEMS
Accelerometers
Switches
Electrostatic actuators
Gyroscopes

Chip-Scale Implementation and Cascade Assembly of Particulate Matter Collectors with Embedded Resonant Mass Balances

Maldonado-Garcia, M., Kumar, V., Wilson, J. C. & Pourkamali, S. Mar 15 2017 In : IEEE Sensors Journal. 17, 6, p. 1617-1625 9 p., 7790817

Research output: Contribution to journalArticle

Aerosols
Microfabrication
Lithography
Nozzles
Scanning electron microscopy

Frequency modulated electrostatically coupled resonators for sensing applications

Ramezany, A., Qaradaghi, V., Kumar, V. & Pourkamali, S. Jan 5 2017 IEEE Sensors, SENSORS 2016 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 7808509

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Resonators
Electrodes
Magnetic fields
Lorentz force
Electrostatic force

Frequency output MEMS resonator on membrane pressure sensors

Qaradaghi, V., Mahdavi, M., Kumar, V. & Pourkamali, S. Jan 5 2017 IEEE Sensors, SENSORS 2016 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 7808883

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Resonators
Membranes
Pressure sensors
MEMS
Stiffness

Nano-precision micromachined frequency output profilometer

Abbasalipour, A., Mahdavi, M., Kumar, V., Pourkamali, S., Daryadel, S. & Minary, M. Jan 5 2017 IEEE Sensors, SENSORS 2016 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 7808884

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Resonators
Sensors
MEMS
Microscopes
Stiffness