A 3-bit digitally operated MEMS rotational accelerometer

Varun Kumar, Alireza Ramezany, Saeed Mazrouei, Roozbeh Jafari, Siavash Pourkamali

Research output: ResearchConference contribution

Abstract

This work presents an electrostatically tunable MEMS rotational acceleration switch and its operation as a 3-bit digital rotational accelerometer. The concept of operating electrostatically tunable acceleration switches as digital MEMS accelerometers, as previously demonstrated, has been applied to rotational acceleration switches in this work leading to an ultra-low power potential alternative to MEMS gyroscopes for lower resolution applications like gaming. The sensor consists of a circular proof mass surrounded by a number of electrostatic actuators. Following a simple algorithm to sequentially turn different actuators ON or OFF, a binary search can be performed by a digital controller to find the rotational acceleration. A 3-bit prototype was successfully fabricated and operated with a resolution of 49 rad/s2 (limited by the available test setup) and full scale acceleration of 392 rad/s2.

LanguageEnglish (US)
Title of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1087-1090
Number of pages4
ISBN (Electronic)9781509050789
DOIs
StatePublished - Feb 23 2017
Event30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
Duration: Jan 22 2017Jan 26 2017

Other

Other30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
CountryUnited States
CityLas Vegas
Period1/22/171/26/17

Fingerprint

accelerometers
microelectromechanical systems
Accelerometers
MEMS
switches
Switches
actuators
gyroscopes
controllers
prototypes
electrostatics
sensors
Electrostatic actuators
Gyroscopes
Actuators
Controllers
Sensors

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Kumar, V., Ramezany, A., Mazrouei, S., Jafari, R., & Pourkamali, S. (2017). A 3-bit digitally operated MEMS rotational accelerometer. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 1087-1090). [7863602] Institute of Electrical and Electronics Engineers Inc.. DOI: 10.1109/MEMSYS.2017.7863602

A 3-bit digitally operated MEMS rotational accelerometer. / Kumar, Varun; Ramezany, Alireza; Mazrouei, Saeed; Jafari, Roozbeh; Pourkamali, Siavash.

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1087-1090 7863602.

Research output: ResearchConference contribution

Kumar, V, Ramezany, A, Mazrouei, S, Jafari, R & Pourkamali, S 2017, A 3-bit digitally operated MEMS rotational accelerometer. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863602, Institute of Electrical and Electronics Engineers Inc., pp. 1087-1090, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 1/22/17. DOI: 10.1109/MEMSYS.2017.7863602
Kumar V, Ramezany A, Mazrouei S, Jafari R, Pourkamali S. A 3-bit digitally operated MEMS rotational accelerometer. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc.2017. p. 1087-1090. 7863602. Available from, DOI: 10.1109/MEMSYS.2017.7863602
Kumar, Varun ; Ramezany, Alireza ; Mazrouei, Saeed ; Jafari, Roozbeh ; Pourkamali, Siavash. / A 3-bit digitally operated MEMS rotational accelerometer. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1087-1090
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